Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods

碩士 === 國立臺灣大學 === 光電工程學研究所 === 94 === Because of the applications in UV-Blue light emitting devices, gallium nitride materials have drawn much attention. In order to reach more advanced processes, a simple and effective method to fabricate sub-micro triangular structures on GaN is needed. This thesi...

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Main Authors:	Pei-Chen Huang, 黃培誠
Other Authors:	彭隆瀚
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/32382783224034134978

id	ndltd-TW-094NTU05124023
record_format	oai_dc
spelling	ndltd-TW-094NTU051240232015-12-16T04:38:21Z http://ndltd.ncl.edu.tw/handle/32382783224034134978 Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods 以微米小球顯影術及光致化學蝕刻法製作氮化鎵次微米三角柱結構 Pei-Chen Huang 黃培誠碩士國立臺灣大學光電工程學研究所 94 Because of the applications in UV-Blue light emitting devices, gallium nitride materials have drawn much attention. In order to reach more advanced processes, a simple and effective method to fabricate sub-micro triangular structures on GaN is needed. This thesis introduces microsphere lithography (MSL) and photoelectrochemical (PEC) etching, and describes how to fabricate sub-micro triangular rods by these methods. Crystallographic etching properties are inspected and compared with triangular rod’s facets. In addition, the rods are analyzed with optically pumped experiment apparatus and the results are discussed in this theis. 彭隆瀚 2006 學位論文 ; thesis 50 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立臺灣大學 === 光電工程學研究所 === 94 === Because of the applications in UV-Blue light emitting devices, gallium nitride materials have drawn much attention. In order to reach more advanced processes, a simple and effective method to fabricate sub-micro triangular structures on GaN is needed. This thesis introduces microsphere lithography (MSL) and photoelectrochemical (PEC) etching, and describes how to fabricate sub-micro triangular rods by these methods. Crystallographic etching properties are inspected and compared with triangular rod’s facets. In addition, the rods are analyzed with optically pumped experiment apparatus and the results are discussed in this theis.
author2	彭隆瀚
author_facet	彭隆瀚 Pei-Chen Huang 黃培誠
author	Pei-Chen Huang 黃培誠
spellingShingle	Pei-Chen Huang 黃培誠 Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
author_sort	Pei-Chen Huang
title	Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
title_short	Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
title_full	Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
title_fullStr	Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
title_full_unstemmed	Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods
title_sort	fabrication and characterization of gallium nitride triangular sub-mirco rods
publishDate	2006
url	http://ndltd.ncl.edu.tw/handle/32382783224034134978
work_keys_str_mv	AT peichenhuang fabricationandcharacterizationofgalliumnitridetriangularsubmircorods AT huángpéichéng fabricationandcharacterizationofgalliumnitridetriangularsubmircorods AT peichenhuang yǐwēimǐxiǎoqiúxiǎnyǐngshùjíguāngzhìhuàxuéshíkèfǎzhìzuòdànhuàjiācìwēimǐsānjiǎozhùjiégòu AT huángpéichéng yǐwēimǐxiǎoqiúxiǎnyǐngshùjíguāngzhìhuàxuéshíkèfǎzhìzuòdànhuàjiācìwēimǐsānjiǎozhùjiégòu
_version_	1718150131842285568

Fabrication and Characterization of Gallium Nitride Triangular Sub-mirco Rods

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