| Summary: | 碩士 === 國立臺灣海洋大學 === 電機工程學系 === 94 === The article use micro electromechanic systematic technique to microchannel system, use yellow light room length facture skill to make microchannel master model, and reverse model by dimethione. Carry out ozone treatment by UV-light to change the character of PDMS surface. Furthermore integrate PDMS microchannel system into light detector to establish a set of fluorescent light detective system.
In the experiment, we utilize SU-8 thick film photoresist being once traversed to smear on the surface of silicon crystal. The thickness can reach about 100μm. We also use controlling exposure area and exposure energy to successfully manufacture hollow microchannel system.
In the aspect of manufacturing sensing module, we adopt indium tin oxidate as transparent electrode to make ITO-Si-MSMPD and ITO-PolySi-MSMPD, measure I-V curve and do material analysis, and make light sensor with better light response degree.
As for detective system, couple mine radiation light source with optical fiber, and then inject excitation fluorescent stain. The excitation fluorescent through light filter received by light detector to detect excitation fluorescent and furthermore analyze the density of fluorescent stain. From the experiment result we know the detective ability of test system can reach 10fmol/3ul.
Key words: microchannel、fluorescence、MSM photodetector
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