Multilayer High Aspect Ratio Metal Technology & its Application in Linear Positioning Micromirror 1D array
碩士 === 國立清華大學 === 微機電工程研究所 === 94 === MEMS technology is one of the most important technology in 21st century. Recently, the design and development of micro-device become more and more important. As the complication of the device increases, the micro-fabrication becomes more difficult. Traditional M...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42033385593508224983 |