A Novel Fabrication Method of SU-8 Embedded Micro Channels and Its Applications
碩士 === 國立清華大學 === 動力機械工程學系 === 94 === SU-8 thick film photoresist is one of the useful materials for fabricating high aspect ratio structures in MEMS applications. In this paper, we present a novel and simple method to fabricate embedded micro channels. The method is based on different light absorpt...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50237263324699630062 |