Investigation of hysteresis phenomenon of Si-based piezo-resistive pressure sensor
碩士 === 國立清華大學 === 動力機械工程學系 === 94 === At present, the silicon piezoresistive pressure sensor is a mature technology in industry and the requirement for measurement accuracy is more rigorous in many advanced applications. In order to meet the needs of industrial mechanical signal sensing, a variety o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80096391031865764431 |