Interface Structures and Mechanical Properties of Porous SiOCH Low Dielectric Constant Films

• Main Authors: Chun-Yi Chang, 張君毅
• Other Authors: Su-Jien Lin
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/79396794759995169688

碩士 === 國立清華大學 === 材料科學工程學系 === 94 ===