Fluorine and nitrogen doping effects on the structures and physical properties of amorphous carbon film synthesized by filtered cathodic arc plasma system
碩士 === 國立清華大學 === 材料科學工程學系 === 94 === In this study, we had deposited carbon-related films in a 90̊ -bend magnetic filtered cathodic arc plasma (FCAP) system using CF4 and N2 as gaseous precursors and a graphite cathode target (99.999% pure). X-ray photoelectron spectroscopy (XPS) was used to study...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/78569753687155310581 |