High Frequency and Microwave Characteristics of BZT/(Ta2O5)1-x(TiO2)x Thin Films deposited by RF Magnetron sputtering for MFIS varactors

High Frequency and Microwave Characteristics of BZT/(Ta2O5)1-x(TiO2)x Thin Films deposited by RF Magnetron sputtering for MFIS varactors

碩士 === 國立清華大學 === 材料科學工程學系 === 94 ===

Bibliographic Details
Main Authors:	Tsan-Chun Wang, 王參群
Other Authors:	Tai-Bor Wu
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/67921665996482219873

Similar Items

High Frequency and Microwave Frequency Characteristics of Ba(Zr,Ti)O3 Thin Films deposited by RF Magnetron Sputtering for MFIS varactors
by: 黃聆惠
Published: (2005)

The Study of BZT Thin Film Deposited on ITO Substrate by RF Magnetron Sputtering
by: Ping-kuan Chang, et al.
Published: (2006)

The Study of (TiO2)x-(Ta2O5)1-xHigh Dielectric Thin Films by RF Sputtering
by: Chan-Yuan Hu, et al.
Published: (1999)

The study on preparation and structural characterization of TiO2 and TiO2-xNx photocatalytic thin films by RF magnetron sputtering
by: Min-Tzung Shiu, et al.
Published: (2005)

Characteristics of (Pb,Ba)ZrO3 Thin Film Varactors Deposited by RF-Magnetron Sputtering
by: Wu Lin-Jung, et al.
Published: (2007)

RF-Magnetron Sputtering TiO2 and Y2O3 on Si
by: S.J.Huang, et al.
Published: (1994)

The Study of FeRAM Devices using BZT Ferroelectric Thin Film Prepared by the RF Magnetron Sputtering Process
by: Lien-Hsiang Chen, et al.
Published: (2005)

Photocatalytic TiO2 films deposited by RF reactive magnetron sputtering
by: Wei-Pin Li, et al.
Published: (2009)

Study of the properties of RF magnetron sputtering Ta2O5 thin film
by: Bo-sen Huang, et al.
Published: (2007)

The Effects of La2O3 and Ta2O5 Additions on the TiO2 Thin Film Prepared by RF Magnetron Sputtering Method
by: Yi-Shiang Lee, et al.
Published: (2004)

The Study of TiO2 Electrochromic Thin Films Deposited by RF Magnetron Sputtering
by: Shih-Yuan Lin, et al.
Published: (2005)

The preparation of SrBi2Ta2O9 thin film by RF. Magnetron sputtering
by: Sam Tiao, et al.
Published: (2005)

Study of the Electrical Properties of RF Magnetron Sputtered Ta2O5 Thin Film
by: Chu, En Liang, et al.
Published: (2013)

In situ X-ray Reflectivity Study the Morphology of The Amorphous and Crystalline Ta2O5 Thin Films Prepared by RF Magnetron Sputtering
by: Tzu-Wen Huang, et al.
Published: (2002)

Optical Properties and Microstructure of ZrO2-x Thin Films Prepared by RF Magnetron Sputtering
by: S. C. Liang, et al.
Published: (2005)

Study of the Properties of TiO2: Nb Thin Films Synthesized by RF Magnetron Sputtering
by: Indah AyuPurwaningrum, et al.
Published: (2015)

Microstructure, Electrical, and Optical Properties of SnO2-X Thin Films Prepared by RF Magnetron Sputtering
by: Fu-Ju Yang, et al.
Published: (2005)

Optoelectronic Characteristics Of ZnO/TiO2 thin films on ITO Substrate by RF Magnetron Sputtering
by: Chung-Hsun Wu, et al.
Published: (2014)

Influence of the deposition parameters on the properties of TiO2 photocatalytic film by r.f. magnetron sputtering
by: Chih-Hao Tsang, et al.
Published: (2008)

Optical Properties and Microstructure of Ta2O5-x Thin Films Prepared by RF Sputtering
by: PAI YI-HAO, et al.
Published: (2004)

The Study of Ba(Zr,Ti)O3 Thin Films Deposited on LaNiO3 electrode by RF Magnetron Sputtering for microwave varactors
by: 劉恒睿
Published: (2003)

The Study on Fabrication of HfO2/TiO2 Multilayer Stack Structure by RF Magnetron Sputtering for High Dielectric
by: Chien,Shih-Chieh, et al.
Published: (2019)

Ozone gas sensor deposed of TiO2/SnO2Composite thin films by RF magnetron sputtering
by: ZHE-MING Li, et al.
Published: (2010)

THE FABRICATION OF Ta2O5 THIN FILMS ON BYUFFER LAYER/ SI BY RF MAGNETRON SPUTTERING AND ITS APPLICATIONS
by: Yu- Juang Juang, et al.
Published: (2000)

Crystal Structure And Optical Properties Of TiO2 Thin Films Prepared By Reactive RF Magnetron Sputtering
by: Goto S., et al.
Published: (2015-06-01)

Optical parameters induced by phase transformation in RF magnetron sputtered TiO2 nanostructured thin films
by: Prabitha B. Nair, et al.
Published: (2014-06-01)

Fabrication of Pt/Ti/TiO2 Photoelectrodes by RF-Magnetron Sputtering for Separate Hydrogen and Oxygen Production
by: Gian Luca Chiarello, et al.
Published: (2016-04-01)

Investigation into the effects of deposition parameters on TiO2 photocatalyst thin films by r.f. magnetron sputtering
by: Wei-Jen Yang, et al.
Published: (2009)

The study of ZnO and TiO2 thin film distributed Bragg reflection structure by RF magnetron sputter system
by: KAO,LI-HAN, et al.
Published: (2018)

Electrical Properties and Microstructure of TaN Thin Film by RF Magnetron Sputtering
by: Ruey-Jer Weng, et al.
Published: (2001)

Study of (TiO2)0.08- (Ta2O5)0.92 Gate Dielectric by RF Sputter
by: Chun-Hsiung Chen, et al.
Published: (2003)

Characteristics of (TiO2)x(Ta2O5)1-x composite films prepared by Radio Frequency Ion Beam Sputtering Deposition
by: Yung-Chi Wu, et al.
Published: (2006)

Otimização do processo de deposição de filmes TiO2:Mn usando RF magnetron sputtering /
by: Pereira, Andre Luis de Jesus.
Published: (2012)

Otimização do processo de deposição de filmes TiO2:Mn usando RF magnetron sputtering
by: Pereira, Andre Luis de Jesus [UNESP]
Published: (2014)

Fabrication of ZnO nanostructure with RF magnetron sputter
by: Jun-Hang Huang, et al.
Published: (2005)

The study of Ga2O3 and TiO2 Thin Film and Distributed Bragg Reflection Structure by RF Magnetron Sputter System
by: HUANG,WEI-SHUN, et al.
Published: (2017)

The Effects of Nb2O5 and Y2O3 Additions on The TiO2 Thin Film Prepared by RF Magnetron Sputtering Method
by: Ruey-Long Lee, et al.
Published: (2002)

The Study of MgxZn1-xO MSM Photodetector with Different Mg content by RF Magnetron Sputter
by: CHEN, SHIH-HSUH, et al.
Published: (2018)

Research of Deposited High Quality (TiO2)-(Ta2O5) Composite Dielectric Thin Films by RF Sputter
by: Ming-Shiann Tsai, et al.
Published: (2002)

Thin film deposition of pure and doped TiO2 by RF magnetron sputtering for visible light photocatalytic and optoelectronic applications
by: Fakhouri, Houssam
Published: (2011)

Cannot write session to /tmp/vufind_sessions/sess_bt6nv0c2va6shtrkj9dslnk3n1