Extrinsic atom doping effects on the structures and physical properties of amorphous carbon film synthesized by filtered cathodic arc plasma system
博士 === 國立清華大學 === 材料科學工程學系 === 94 === Carbon based materials were synthesized by using the filter cathodic arc plasma system, and extrinsic atoms, e.g. nitrogen, boron and fluorine elements were doped into the thin films in this study. Four types of carbon-related films were studied, they are: amorp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96205054919030246154 |