Detection and Identification of Intersecting Defect Patterns in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 94 === The processes of semiconductor manufacturing have become more complicated and its yield faces a big challenge. Finding the way of improving the yield is a very critical issue. The direct method to enhance the yield should focus on the manufacturing processes...
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| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72366608882701486872 |