Development of Wafer Bin Map Pattern Recognition Model - Using Neural Network Approach
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 94 === In semiconductor manufacturing, the manufacturing parameters are recorded automatically to provide information to engineers. But it is hard to find out the root cause of the problem from the enormous database. The engineers cannot response quickly when proble...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45065431368261219164 |