Using Mathematical Optimization method to Solve the Uniformity Problem in Chemical Mechanical Polishing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 94 === The process of semiconductor fabrication is very complex and it needs expensive materials, precise machines and high-standard environment for production. Semiconductor industry has the characteristics of high cost and low life cycle, so how to enhance yield s...
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| Format: | Others |
| Language: | en_US |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16398429554630932565 |