The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface

碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 94 === We use Particle-in-Cell Method（PIC）and Monte-Carlo-Collision Method（MCC）to model a plasma colliding system .By this way，we can realize the behaviors and effects in the motion of plasma collision . Our mainly discuss is that the system will produce a thin la...

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Bibliographic Details
Main Authors:	Shih-cing Luo, 羅仕清
Other Authors:	Peng-Sheng Wei
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/89396195679279534130

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spelling	ndltd-TW-094NSYS54900022016-05-27T04:18:57Z http://ndltd.ncl.edu.tw/handle/89396195679279534130 The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface 粒子碰撞對電漿與工件表面間不平衡電荷薄層內輸送現象之影響 Shih-cing Luo 羅仕清碩士國立中山大學機械與機電工程學系研究所 94 We use Particle-in-Cell Method（PIC）and Monte-Carlo-Collision Method（MCC）to model a plasma colliding system .By this way，we can realize the behaviors and effects in the motion of plasma collision . Our mainly discuss is that the system will produce a thin layer（Sheath）between plasma and a workpiece ，and the effects of colliding phenomenon in this thin layer（Sheath） . Peng-Sheng Wei 魏蓬生 2006 學位論文 ; thesis 70 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 94 === We use Particle-in-Cell Method（PIC）and Monte-Carlo-Collision Method（MCC）to model a plasma colliding system .By this way，we can realize the behaviors and effects in the motion of plasma collision . Our mainly discuss is that the system will produce a thin layer（Sheath）between plasma and a workpiece ，and the effects of colliding phenomenon in this thin layer（Sheath） .
author2	Peng-Sheng Wei
author_facet	Peng-Sheng Wei Shih-cing Luo 羅仕清
author	Shih-cing Luo 羅仕清
spellingShingle	Shih-cing Luo 羅仕清 The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
author_sort	Shih-cing Luo
title	The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
title_short	The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
title_full	The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
title_fullStr	The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
title_full_unstemmed	The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
title_sort	effects of collisions on transport processes in the sheath between plasma and a workpiece surface
publishDate	2006
url	http://ndltd.ncl.edu.tw/handle/89396195679279534130
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The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface

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