The Effects of Collisions on transport processes in the sheath between plasma and a workpiece surface
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 94 === We use Particle-in-Cell Method（PIC）and Monte-Carlo-Collision Method（MCC）to model a plasma colliding system .By this way，we can realize the behaviors and effects in the motion of plasma collision . Our mainly discuss is that the system will produce a thin la...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89396195679279534130 |
| Summary: | 碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 94 === We use Particle-in-Cell Method（PIC）and Monte-Carlo-Collision Method（MCC）to model a plasma colliding system .By this way，we can realize the behaviors and effects in the motion of plasma collision .
Our mainly discuss is that the system will produce a thin layer（Sheath）between plasma and a workpiece ，and the effects of colliding phenomenon in this thin layer（Sheath） .
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