Fabrication of self-assembly porous alumina and its applications

• Main Authors: Kun-Tong Tsai, 蔡焜棟
• Other Authors: Tsong-Sheng Lay
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/91286370833117701837

碩士 === 國立中山大學 === 光電工程研究所 === 94 === In this thesis, the growth and fabrication of the self-assembly ordered porous alumina have been investigated. First, well-ordered honeycomb array can be obtained in large area under well-anodizing condition. The diameter of formed porous alumina was about 40 to 80 nm. Pore diameter can be tuned by different voltage and electrolyte. After we got such an ordered-arrangement porous alumina array, the following analysis of the material optical properties were characterized. In the luminescence behavior, photoluminescence (PL) measurements showed a strong PL peak in blue. The PL peak was at 420 nm excited by He-Cd laser. Material transmittance was also detected, the result showed that material was transparent above 400 nm. On the other hand, the porous alumina membrane can be used as a mask. For working as negative mask, we evaporated the metal such as Au or Ti into the membrane and the metal filled into the porous to adhere to the semiconductor substrate. After lifting-off the membrane, the metal nanadots was formed on the substrate. The size and the position of these metal nanodots were distinctly-controlled by the mask. For working as replica mask, we have used the membrane as an etching mask to transfer the pattern to the semiconductor substrate successfully. This technique has the advantages of low cost and large area for nano-fabrication.