The Study and Fabrication of 2D Photonic Crystal Microcavity and LC-DFB laser

• Main Authors: Chau-Wei Shiue, 薛超瑋
• Other Authors: Tsong-Sheng Lay
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/88976695564899650888

碩士 === 國立中山大學 === 光電工程研究所 === 94 === In this thesis, we fabricated the 2D photonic crystal microcavity and laterally coupled distributed feedback laser on InGaAs/InAlGaAs wafers by E-beam lithography. We also fabricated the 2D photonic crystal microcavity on the InGaAs/GaAs substrate at 980nm emission wavelength. The wafer are grown by molecular beam epitaxy (MBE). For the laterally coupled distributed feedback laser (LC-DFB laser) , we changed the grating shape and length to form proper grating, and it will make constructive diffraction and coupling. We design the mirror width is 180.55nm and the air gap is 541.65nm. For the 2D photonic crystal (2DPC) microcavity, a triangular array of air columns was adopted. The lattice constant and air columns radius are 1139nm and 456nm, respectively. The TE modes photonic band gap of this structure are corresponding to wavelength range in 1522.72nm~1617.89nm. We placed single defect in the 2DPCs to form 2DPC microcavities and the corresponding defect modes are 1549.23nm and 1550.08nm. We have simulated the photonic bandgap and fabricated the devices by E-beam lithography and deep dry etching process. Also, we can use the same method to fabricate 980nm photonic crystal.