| Summary: | 碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 94 === ABSTRACT
The goal of this thesis focuses on developing a high-precision positioning table.
The thin and small product becomes tendency and its inner parts need more and more
precision. The positioning mechanism, which is composed by servo motors and ball
screws, encounters some problems, such as achieving the upper limit of resolution,
overcoming back lash and friction in high-precision positioning. In order to increase the
precision, we make use of the low-heat, high-precision piezoelectric actuators to design
a six-degree-of-freedom positioning table, which depends on the principle of elastic
deformation. In this thesis, the six-degree-of-freedom positioning table, which consists
of two different kinds of three-degree-of-freedom positioning tables, has several
advantages such as low-cost, high-precision, high-range and miniaturization, and can be
applied to the assembly, processing, bio-tech and medicine detection and semi-conduct
industry. The maximum translation rage of the six-degree-of-freedom positioning table
is about -1~5 μm, and the corresponding one-step displacement is about 50 nm. The
maximum rotation range is about ± 80 μrad and the corresponding one-step angular
displacement is about 5μrad. The minimum radius of the circular trajectory in the XY
plane is about 10 nm.
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