Study on sputtering parameters of Zirconium Nitride on forged AZ31B magnesium alloy

• Main Authors: Yi-Chun Tu, 凃伊駿
• Other Authors: Tsow-Chang Fu
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/67627508760670193540

碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 94 === Abstract The Magnesium Alloy possesses the high-thermal conductivity and anti-EMI capability. It would be widely used in outer case of 3C products and would substitute for plastics very soon. The main manufacturing process of Mg Alloy was by die casting traditionally. However, when the thickness of product is getting thinner, the failure rate will cause the cost higher. Thus, the new process such as stamping and forging are gradually considered. But both the die casting and new shaping process need post surface treatment to increase the anticorrosive capability and better-looking appearance. Traditional surface treatment adopts the conversion treatment by paint or electroplating which would cause the environmental pollution simultaneously. The main purpose of this research is to adopt unbalance magnetron process to sputter the ZrN film on forged Mg Alloy substrate. In this research we use Taguchi method to investigate the main parameters first. The parameters are including Nitrogen flow, substrate bias, target current, and working distance between substrate and object surface. Then we use the singe factor to study how substrate bias and Nitrogen flow will affect coating film. By experiments the adhesive capability ZrN film, we found the best parameters would be such as 3A in Zr target current, 7sccm in Nitrogen Flow,-150V for Substrate Bias, 10cm for working distance, which could get golden color and the Rockwell’s indenter Adherence by HF1. Moreover, we also discuss the effect of component to color and the deposition structure in this article.