Studies of Scanning Capacitance Force Microscopy and Spectroscopy on Determining Concentrations of n-type and p- type Si Wafers
碩士 === 國立東華大學 === 應用物理研究所 === 94 === Using atomic force microscopy (AFM) and scanning capacitance force microscopy (SCFM), the study is first to get the surface morphology and surface capacitance profiles of n-type and p-type silicon wafers which are doped in different concentrations. Then, the capa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22069643603977321622 |