Effect of underlying metals and emitter patterns on the field emission properties of CNT diode devices

碩士 === 國立嘉義大學 === 光電暨固態電子研究所 === 94 === The present paper mainly was used the microwave plasma enhanced-chemical vapor deposition(MP-CVD) growing carbon nanotube (CNTs) by (Ni) the array (10μm x 10μm) and different spaces (20μm、15μm、10μm、5μm) with four different metals (TiN,Ti,Ta) to be the barrier...

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Bibliographic Details
Main Authors: Jen-Hao Hsu, 許仁豪
Other Authors: Tsung-Lung Li
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/92739368315904563539