Growth and Optical Property of Zinc Oxide Thin Films Deposited by Radio Frequency Sputtering
碩士 === 國立彰化師範大學 === 光電科技研究所 === 94 === Abstract This thesis is devoted to the study on Zinc Oxide films deposited by radio frequency sputtering. A commercially supplied ZnO ceramic plate with a purity of 99.9% was used as a target. We kept the working pressure and the rf power constant and varied th...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41207584211286951631 |