A study on the wet etching process of AZO(ZnO:Al)transparent conducting film
碩士 === 國立彰化師範大學 === 機電工程學系 === 94 === The purpose of this study is to investigate the effect of wet etching process on the AZO(ZnO:Al) film. RF magnetron sputtering system was used to deposit AZO thin film on 1737F glass substrates. Sputtering parameters were adjusted and heat treatments were employ...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56879243730170013917 |