none

• Main Authors: Pei-Fu Kao, 高培復
• Other Authors: Shyh-Biau Jiang
• Format: Others
• Language: zh-TW
• Online Access: http://ndltd.ncl.edu.tw/handle/30870156281381865937

碩士 === 國立中央大學 === 光機電工程研究所 === 94 === There are two purposes in this paper. 1.We want to find a balance point between plating time and growth time through improvement of our MAGE control system. 2.We establish the digital imaging subsystem on our original MAGE control system, and use the digital imaging subsystem to observe the growth behavior of micro electroplating. In order to reduce the plating time, we have the new idea of vibrating our anode. Our new idea can speed up convection and diffuse of ion, and reduce the plating time effectively. Our new idea not only reduces the plating time also has good quality of the metallic micro column. In this article, we introduce the hardware and software module of MAGE control system. We have experiments to discuss our new idea. In digital imaging subsystem, we have continuous grabbing image and image recording to discuss the growth behavior of micro electroplating.