The Research of Obliquely Deposited Films at 193nm
碩士 === 國立中央大學 === 光電科學研究所 === 94 === Obliquely depositing Magnesium fluoride, Lanthanum fluoride, and Gadolinium fluoride for deposition angles in the range 20°–70°. Column angles were determined ex situ from scanning electron microscopy photographs of deposition-plane fractures. Stress was measured...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19848580736567563789 |