The System Identification and Control for a Linear-Motor-Driven Motion Stage Under Micro Dynamic Scale

• Main Authors: Hong-Rong Lin, 林宏榮
• Other Authors: An-Chen Lee
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/85204547651447422039

碩士 === 國立交通大學 === 機械工程系所 === 94 === The mainly researches of this thesis is to analyze the dynamic behavior of the bristles under the micro-dynamic scale for a linear-motor-driven motion stage. The system would be influenced by the friction force under macro-dynamic scale. The accuracy of the motor has a little deviation, consequently, we need the friction compensator in order to solve this phenomenon. If the system is in the presliding region or known as stick-slip region, at this time, there is no more friction phenomenon. The behavior of system is only left bristles dynamic, that is to say, the bristle hasn’t broken away the contact surface yet. Therefore, the thesis mainly identifies the bristles dynamic behavior before it breaks away from the contact surface. With this estimated model, we are able to understand the characteristics of the bristles under the micro-dynamic scale, and design the micro-type controller. In the period of performing the macro-dynamic scale positioning control, in the beginning, we can adopt the macro-type controller to perform the macro-scale tracking control. When the system is about to enter the desired position, we can switch the macro-type controller to micro-type controller to perform the micro-dynamic scale positioning control. The experimental results show the performance with this two stages control architecture is obviously much superior to that with only used the macro-type controller, and the settling time of the system is obviously improved. In this way, as long as we used it well that switching to the micro-type controller when the system is in the period of performing positioning control, we don’t need the powerful macro-type controller to achieve the positioning control.