Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing

Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing

碩士 === 國立交通大學 === 電信工程系所 === 94 ===

Bibliographic Details
Main Author:	隋志暉
Other Authors:	張振壹
Format:	Others
Language:	en_US
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/76051337268322513817

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