Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing

碩士 === 國立交通大學 === 電信工程系所 === 94 ===

Bibliographic Details
Main Author:	隋志暉
Other Authors:	張振壹
Format:	Others
Language:	en_US
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/76051337268322513817

id	ndltd-TW-094NCTU5435117
record_format	oai_dc
spelling	ndltd-TW-094NCTU54351172016-05-27T04:18:55Z http://ndltd.ncl.edu.tw/handle/76051337268322513817 Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing 高速模型演算法擺放無意義金屬用以改善化學機械研磨的平整度隋志暉碩士國立交通大學電信工程系所 94 張振壹陳宏明 2006 學位論文 ; thesis 28 en_US
collection	NDLTD
language	en_US
format	Others
sources	NDLTD
description	碩士 === 國立交通大學 === 電信工程系所 === 94 ===
author2	張振壹
author_facet	張振壹隋志暉
author	隋志暉
spellingShingle	隋志暉 Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
author_sort	隋志暉
title	Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
title_short	Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
title_full	Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
title_fullStr	Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
title_full_unstemmed	Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
title_sort	fast and model-based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing
publishDate	2006
url	http://ndltd.ncl.edu.tw/handle/76051337268322513817
work_keys_str_mv	AT suízhìhuī fastandmodelbasedalgorithmfordummypatterninsertioninlayoutuniformityofchemicalmechanicalpolishing AT suízhìhuī gāosùmóxíngyǎnsuànfǎbǎifàngwúyìyìjīnshǔyòngyǐgǎishànhuàxuéjīxièyánmódepíngzhěngdù
_version_	1718283444292681728

Fast and Model-Based algorithm for dummy pattern insertion in layout uniformity of chemical mechanical polishing

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