Study on SiGe and SiC Films in MOSFETs and Poly-SiGe and Multi-Channel Poly-Si in TFTs
博士 === 國立交通大學 === 電子工程系所 === 94 === In this thesis, two kinds of devices (MOSFETs and TFTs) have been fabricated to examine the films effect and integration of device characteristics. First, the effects of polish pad conditions and slurry solid contents on SiGe chemical mechanical polishing (CMP) pr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27183825272616659843 |