Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures

Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures

碩士 === 國立交通大學 === 光電工程系所 === 94 ===

Bibliographic Details
Main Authors: Long-Cai Jhuo, 卓龍材
Other Authors: Sung-O Kim
Format: Others
Language:en_US
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/08017370447216019053
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spelling ndltd-TW-094NCTU51240452016-05-27T04:18:37Z http://ndltd.ncl.edu.tw/handle/08017370447216019053 Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures 氖氣/氬氣混合之運用厚膜光阻形成阻隔壁之微電漿元件特性之研究 Long-Cai Jhuo 卓龍材 碩士 國立交通大學 光電工程系所 94 Sung-O Kim 金星吾 2006 學位論文 ; thesis 60 en_US
collection NDLTD
language en_US
format Others
sources NDLTD
description 碩士 === 國立交通大學 === 光電工程系所 === 94 ===
author2 Sung-O Kim
author_facet Sung-O Kim
Long-Cai Jhuo
卓龍材
author Long-Cai Jhuo
卓龍材
spellingShingle Long-Cai Jhuo
卓龍材
Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures
author_sort Long-Cai Jhuo
title Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures
title_short Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures
title_full Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures
title_fullStr Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures
title_full_unstemmed Characterization of Micro-plasma Devices Using Thick Photoresist as a Barrier Rib in Neon-Argon Gas Mixtures
title_sort characterization of micro-plasma devices using thick photoresist as a barrier rib in neon-argon gas mixtures
publishDate 2006
url http://ndltd.ncl.edu.tw/handle/08017370447216019053
work_keys_str_mv AT longcaijhuo characterizationofmicroplasmadevicesusingthickphotoresistasabarrierribinneonargongasmixtures
AT zhuōlóngcái characterizationofmicroplasmadevicesusingthickphotoresistasabarrierribinneonargongasmixtures
AT longcaijhuo nǎiqìyàqìhùnhézhīyùnyònghòumóguāngzǔxíngchéngzǔgébìzhīwēidiànjiāngyuánjiàntèxìngzhīyánjiū
AT zhuōlóngcái nǎiqìyàqìhùnhézhīyùnyònghòumóguāngzǔxíngchéngzǔgébìzhīwēidiànjiāngyuánjiàntèxìngzhīyánjiū
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