A Study of Integrating FAB Equipment Monitoring System and CIM System--using X company as example

• Main Author: 李建維
• Other Authors: Der-Baau Perng
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/99736107713535633106

碩士 === 國立交通大學 === 管理學院碩士在職專班工業工程與管理組 === 94 === In this thesis, the Theory of Constraints Thinking Process (TOC TP) was used to analyze the manufacturing process and historical wafer-scrapping data of semiconductor FABs. It comes to the conclusion that FAB will be brought into virtuous circle through inducing advanced equipment monitoring system. That is, quality management, risk and innovation management, human resource management, and knowledge management can be well done with the help of proper integration of advanced equipment monitoring system and computer integrated manufacturing system. According to historical wafer-scrapping data of FABs, this thesis came out six functions that ECS (Equipment Control System) should provide as follow: 1. VRTMS: Variable Real-Time Monitor System 2. ECCS: Equipment Constants Comparing System 3. FDS: FAULT Detection System 4. RCS: Recipe Comparing System 5. PCS: Process Constraint System 6. PMS: Preventive Maintenance System To realize the six functions, this thesis provided specifications, control actions, and solution to identify parameters without identification. The six functions were integrated with CIMS by means of EAI (Enterprise Application Integration), which makes up what the associated researches lack, say ECS classification and omni-FAB implementation. The proposed concept has been implemented in X-company, a representative FAB in Hsinchu Science-based Park, Taiwan. The wafer-scrapping ratio was reduced about 0.5% after one year and ten months’ operation, and the applied scrap-proof monitoring objects are increasing. The results supported the proposed concept of integrating advanced equipment monitoring system with computer integrated manufacturing system.