The Study of the Laser-assisted Direct Imprinting Fabrication on Semiconductor Thin Films
碩士 === 國立成功大學 === 微機電系統工程研究所 === 94 === The field of nano-technology is advancing rapidly. For high-throughput and low-cost lithography, Nano-imprinting technologies have been developed. Hence, we want to establish parameters for the laser-assisted direct imprinting fabrication on semiconductor th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42890892371199605712 |