Study on mechanical behaviors and properties of nanometer-scale film deposition using molecular dynamics simulation
博士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === The growth of thin films on substrate has become a field of much current research, because of the fabrication of many modern micro/nanometer devices. The morphology of growing nanometer-scale copper film by the sputtering process is studied using molecular dyn...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/50076515784558152599 |