Pulsed laser-assisted nanoimprint with molecular dynamics analysis
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === The objective of this thesis is to study the laser-assisted nanoimprint on nickel substrate with various laser energy densities, laser pulsed duration and mold imprint speeds by molecular dynamics theory. The diamond mold material was used to transmit the lase...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76529717819678472711 |