| Summary: | 碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === The objective of this thesis is to study the laser-assisted nanoimprint on nickel substrate with various laser energy densities, laser pulsed duration and mold imprint speeds by molecular dynamics theory. The diamond mold material was used to transmit the laser light. The workpiece material is nickel with a size of 1.76nm×0.7nm×3.52nm. The main task of the thesis is to investigate the basic principle and mechanism of the laser-assisted nanoimprint technology, and find out the elementary parameters in the laser-assisted nanoimprint technology. These parameters will be evaluated by numerical approach. In the numerical simulations, it can be found: (1) the mold loading will decrease while the laser energy increasing, the stress of workpiece also decreases while laser energy increasing, (2) the mold loading will decrease while the laser pulsed duration time increasing. (3) when the mold imprint speed is increased, the mold loading will increase to make the workpiece deform.
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