Tribological performance of ZrN ceramic thin films with Ti additions
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === In this experiment, a dc unbalanced magnetron sputtering system was employed to prepare a series of ZrN and Zr-Ti-N coatings on various substrates, including HSS steel, Si wafer and cutting inserts, etc. At first, the nitrogen gas flow and other process para...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51017273227638664002 |