Monolithic DCFL Integration Using Enhancement-/ Depletion-mode Double δ-Doped AlGaAs/InGaAs pHEMTs
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 94 === Abstract In this work, we fabricated enhancement-/depletion-mode by a developed citric etchant. The etchant near room temperature(23℃) possesses a high GaAs/AlGaAs etching selectivity applied to an etched stop surface. Since it is expected that control...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71443903172996341149 |