Fabrication of the Underwater Acoustic Sensor by using one-step Deep Reactive-Ion Etching process
碩士 === 國立成功大學 === 系統及船舶機電工程學系碩博士班 === 94 === This study reports a novel design of a MEMS type underwater acoustic sensor using 6”single-crystalline silicon wafer. At resonant frequent of the membrane structure , a high signal-to-noise ratio is expected by chemical vapor deposition thin layers of si...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/86454585656291712810 |