The growth and application of nanodiamond composite films

• Main Authors: Min-Sheng You, 游閔盛
• Other Authors: Franklin chau-Nan Hong
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/48793225612275827151

碩士 === 國立成功大學 === 化學工程學系碩博士班 === 94 === Abstract This subject is divided into two parts. The first is fabrication of Nano-diamond films via CH4/H2 as gas source in a hot-filament chemical vapor deposition reactor. The growth rate、grain size、film quality are analysis by SEM, XRD, and RAMAN. The second is fabrication of nanodiamond/SiC nanocomposite. By carefully controlling the gas contents of HMDSO, various nanocomposite films(61Gpa~31Gpa) were synthesized. And fracture toughness were also enhanced via introducing 0.11%Si source in the atmosphere. TEM、XPS analysis also suggest an amorphous SiOx structure in our nanocomposite films.