Preparation and Characterization of AZO Transparent Conducting Films

• Main Authors: Sung-Hsun Chiang, 江松勳
• Other Authors: Dong-Hwang Chen
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/40416341546176562446

碩士 === 國立成功大學 === 化學工程學系碩博士班 === 94 === 英文摘要 In this thesis, the Au or Ag-containing aluminum doped ZnO colloid solutions were prepared by sol-gel method. After spin coating, drying, calcinations in air and hydrogen heat treatment, the transparent conducting films were obtained. The effects of trace metal doping and process parameters on the optical property and conductivity of AZO films were studied. First, the Au or Au/Ag-containing AZO films were prepared and the effects of heat-treatment conditions on the conductivity and transparency in visible region were investigated. It was found that the electrical resistivity could be reduced to be 1.03×10-3 Ω-cm by the addition of Au/Ag nanoparticles. In addition, by investigating the effect of aging time on the grain size of Ag-containing AZO, it was found that the electrical resistivity was as low as 9.38×10-4 Ω-cm after aging 5 days. This was the lowest value in our research. Also, the decrease of transparency in visible region was negligible. By investigating the effects of hydrothermal or solvothermal treatments on the conductivity and transparency of Ag-containing AZO films, the direct hydrogen treatment without the calcination in air was shown to be practicable. Below 500℃, the addition of Ag significantly raised the conductivity of AZO films. At 400℃, the electrical resistivity was as low as 7.5×10-3 Ω-cm. For AZO and Au-containing AZO films, the electrical resistivity was also reduced above 400℃ but the reduction was not significant as that for Ag-containing AZO films. Also, their resistivities were close at 500℃. It was found that the addition of Au did not reduce the electrical resistivity as the addition of Ag did. As for the study on the hydrothermal or solvothermal treatments, it was found that the solvothermal treatment in 2-methoxyethanol seemed to be practicable. However, the surface layer was not dense enough so that the electric conductivity was not raised.