Finite Element Analysis of Thin Film Stress
碩士 === 國立成功大學 === 土木工程學系碩博士班 === 94 === In this work we employ the finite element software, ABAQUS, to simulate the stress evolution in film-substrate system subject to intrinsic mismatch strains. The mismatch strain could be origined from surface stress, different thermal expansion coefficients, a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85269848723873842334 |