Finite Element Analysis of Thin Film Stress

• Main Authors: Cheng-Han Chou, 周政翰
• Other Authors: Tung-Yang Chen
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/85269848723873842334

碩士 === 國立成功大學 === 土木工程學系碩博士班 === 94 === 　In this work we employ the finite element software, ABAQUS, to simulate the stress evolution in film-substrate system subject to intrinsic mismatch strains. The mismatch strain could be origined from surface stress, different thermal expansion coefficients, and others. In pratical situations it is difficult to measure the stress in situ. The renowned Stoney formula provides a simple analytical connection between the internal stress and the curvature of the substrate, and thus could serve as a convenient tool to estimate stress through the measured curvature. However, the derivation of the Stoney formula was based on classical plate assumptions. In addition, the energy terms associated with the film deformation are all neglected. Naturally, this formula, though simple, could only be valid under certain conditions. Here we employ the finite element analysis to examine the range of validity of Stoney formula.