Field Tests and Performance Improvement by Numerical Simulation of a Cleanroom

• Main Author: 李國正
• Other Authors: 王輔仁
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/9f4ygq

碩士 === 國立勤益技術學院 === 冷凍空調系 === 94 === The particles-free conditions provided by cleanrooms are essential for much of modern manufacturing industry. The cleanrooms have to be first designed and constructed; they then have to be tested to ensure they achieve their design specification and continue to do so even at fully operational stage. In this study, field-testing of cleanroom such as airborne particle counts, airflow volume, turbulent intensity, temperature and pressurization have been carried out under different occupation state in our newly constructed MEMS laboratory. However, there exists improvement potential for contamination control due to the high particle counts at specific sampling locations. The computer fluid dynamics (CFD) simulation was conducted to investigate airflow characteristics based on field-testing data consequently. The improvement strategies with less expenditure have been proposed and assessed comprehensively. Furthermore, the effect of clothing on thermal comfort in the cleanroom and energy consumption index has been measured and analyzed extensively. The results from computer simulation indicated that the improvement of airflow could be achieved not only by increasing the number of fan-filter unit (FFU) but also by proper arrangement of return air grills at both side of cleanroom. It was also expected that CFD aided simulation could identify strategies for best practice as well as reduce trial-and-error effort while modifications of cleanroom were conducted.