The Study of Spline Run-to-Run Controller in Nonlinear Dynamic System
碩士 === 銘傳大學 === 應用統計資訊學系碩士班 === 94 === Recently, run-to-run controllers had been applied in semi- conductor manufacturing processes. Though many run-to-run controllers performed well in linear dynamic system, only few controllers had been discussed in nonlinear dynamic system. In this paper, we prop...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/w5enjv |