The transparent conductive film of ZnO doped with MgF2 deposited by sputtering
碩士 === 崑山科技大學 === 電機工程研究所 === 94 === Zinc oxide (ZnO) has a c-axis preferred orientation, but undoped ZnO has very high resistivity. Its conductivity was mainly controlled by substituting zinc site atom and oxygen vacancy. Therefore, ZnO films characteristics was affected by processing parameter....
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| Format: | Others |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39278374610275328849 |