Study of the proerties of Sputtering ZnO Transparent Conducting Films with Al3+ and Ru4+ doping
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 94 === Transparent conductive ZnO film co-doped with Ru and Al by using RF magnetron sputtering at room temperature were investigated. To further increase electrical conductivity of the ZnO thin films, most of the efforts have been done on single element doping by su...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78439424393251167019 |