| Summary: | 碩士 === 逢甲大學 === 機械工程學所 === 94 === Devices of Micro-electro-mechanical System (MEMS) include microactuators, microsensors and their transducers. Where, the microactuators drive the whole system and enable the system to operate effectively. Electro-thermal actuators are one of the most important microactuators of MEMS. Therefore, how to optimize the size of electro-thermal microactuators is an important topic. Using numerical methods of finite element method by the software ANSYS, the performance of electro-thermal actuators is analyzed for details. Due to heat generation from applied voltages and thermal expansion of material, the microactuators will deform. The relation between stresses and applied voltages is in direct proportion and is linear. The relation between stresses and deformation with the side direction that cause in result two cantilever beams expand is linear, too. From the analysis results, the second cold arm has effect on the performance. As the results shown, when the cold arm is more near the free end, the highest temperature lowers down and the lateral displacement increases. It is also found that the width of the second cold has almost no significant effect on performance of the microactuator. Comparing the electro-thermal microactuators with two and single cold arms, the actuator with two cold arm will have smaller stresses than the actuator with single cold arm. However, the displacement of the actuators with two cold arms and single cold arm has no difference under different applied voltages.
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