Modeling and analysis of micro electrothermal actuator

碩士 === 逢甲大學 === 機械工程學所 === 94 === In micro-electromechanical system (MEMS), the micro-actuator is the core part that provides motion. This thesis presents a lumped dynamic model for polysilicon electro-thermal micro-actuators. Based on proposed model, analytical and simulation analysis is conducted...

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Main Authors:	Chun-Sheng Wang, 王春盛
Other Authors:	Chih-Ching Lo
Format:	Others
Language:	zh-TW
Published:	2006
Online Access:	http://ndltd.ncl.edu.tw/handle/43554421967744062194

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spelling	ndltd-TW-094FCU054890032015-12-11T04:04:17Z http://ndltd.ncl.edu.tw/handle/43554421967744062194 Modeling and analysis of micro electrothermal actuator 電熱式微致動器之動態建模及分析 Chun-Sheng Wang 王春盛碩士逢甲大學機械工程學所 94 In micro-electromechanical system (MEMS), the micro-actuator is the core part that provides motion. This thesis presents a lumped dynamic model for polysilicon electro-thermal micro-actuators. Based on proposed model, analytical and simulation analysis is conducted to investigate the effects of the actuators’ geometric parameters on the system’s dynamic response. Chih-Ching Lo 羅致卿 2006 學位論文 ; thesis 51 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 逢甲大學 === 機械工程學所 === 94 === In micro-electromechanical system (MEMS), the micro-actuator is the core part that provides motion. This thesis presents a lumped dynamic model for polysilicon electro-thermal micro-actuators. Based on proposed model, analytical and simulation analysis is conducted to investigate the effects of the actuators’ geometric parameters on the system’s dynamic response.
author2	Chih-Ching Lo
author_facet	Chih-Ching Lo Chun-Sheng Wang 王春盛
author	Chun-Sheng Wang 王春盛
spellingShingle	Chun-Sheng Wang 王春盛 Modeling and analysis of micro electrothermal actuator
author_sort	Chun-Sheng Wang
title	Modeling and analysis of micro electrothermal actuator
title_short	Modeling and analysis of micro electrothermal actuator
title_full	Modeling and analysis of micro electrothermal actuator
title_fullStr	Modeling and analysis of micro electrothermal actuator
title_full_unstemmed	Modeling and analysis of micro electrothermal actuator
title_sort	modeling and analysis of micro electrothermal actuator
publishDate	2006
url	http://ndltd.ncl.edu.tw/handle/43554421967744062194
work_keys_str_mv	AT chunshengwang modelingandanalysisofmicroelectrothermalactuator AT wángchūnshèng modelingandanalysisofmicroelectrothermalactuator AT chunshengwang diànrèshìwēizhìdòngqìzhīdòngtàijiànmójífēnxī AT wángchūnshèng diànrèshìwēizhìdòngqìzhīdòngtàijiànmójífēnxī
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Modeling and analysis of micro electrothermal actuator

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