Modeling and analysis of micro electrothermal actuator
碩士 === 逢甲大學 === 機械工程學所 === 94 === In micro-electromechanical system (MEMS), the micro-actuator is the core part that provides motion. This thesis presents a lumped dynamic model for polysilicon electro-thermal micro-actuators. Based on proposed model, analytical and simulation analysis is conducted...
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| Format: | Others |
| Language: | zh-TW |
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2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43554421967744062194 |
| Summary: | 碩士 === 逢甲大學 === 機械工程學所 === 94 === In micro-electromechanical system (MEMS), the micro-actuator is the core part that provides motion. This thesis presents a lumped dynamic model for polysilicon electro-thermal micro-actuators. Based on proposed model, analytical and simulation analysis is conducted to investigate the effects of the actuators’ geometric parameters on the system’s dynamic response.
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