A Suggestive Tuning System Using Neural Network Theory for the Prediction of the Membrane Thickness in PECVD Process
碩士 === 中原大學 === 機械工程研究所 === 94 === ABSTRACT The principal object of this research is to develop a neural network model by using the parameters of the plasma enhanced chemical vapor deposition（PECVD）and the membrane thickness, then extracting the ration fuzzy rules between input and output from neura...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10350440003727876935 |