Design of constant ration micropump with comb drive

碩士 === 中原大學 === 機械工程研究所 === 94 === Abstract This paper deals with pump design and pump simulation. This researcher comes up with a new form of pump where micropump actuator is different than before. Namely, the micropump utilizes comb drive as its actuator. In addition, in the micropump’s chamber t...

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Bibliographic Details
Main Authors: Ming-Cheng Shiu, 徐名成
Other Authors: Yaw-Jen Chang
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/70633280198098755604
Description
Summary:碩士 === 中原大學 === 機械工程研究所 === 94 === Abstract This paper deals with pump design and pump simulation. This researcher comes up with a new form of pump where micropump actuator is different than before. Namely, the micropump utilizes comb drive as its actuator. In addition, in the micropump’s chamber this researcher designs a piston compressing which helps achieve constant ration of fluid. The chamber is full of fluid when the piston goes up slowly; however, the fluid outputs when the piston goes down. In order to achieve constant ration of fluid, this researcher precisely controls the quantity of fluid through voltage variations. The research method is to simulate the features of micropump based on ration analysis of comb drive. This researcher can analyze fluid in the chamber and the structures of comb drive by simulating the pump. Therefore, this researcher can achieve constant ration of fluid in the micropump under the control of such system.